Effect of radio frequency discharge power on dusty plasma parameters

被引：0
|
作者：
Sheridan, T.E. [1 ]
机构：
[1] Department of Physics and Astronomy, Ohio Northern University, Ada, OH 45810, United States
来源：
Journal of Applied Physics | 2009年 / 106卷 / 03期
关键词：
The parameters of a two-dimensional dusty plasma consisting of six; 9 μm diameter particles trapped inside a radio frequency (rf) plasma sheath have been measured as a function of rf power in a 13.5 mtorr (1.8 Pa) argon discharge. The center-of-mass and breathing frequencies are found by projecting the cluster's Brownian motion onto the associated normal mode. The center-of-mass frequency (i.e; radial confinement) is insensitive to rf power. The Debye shielding parameter κ; as found from the breathing frequency; increases from ≈0.5 to 2 as the square root of rf power. The Debye length decreases from ≈2.7 to 0.7 mm as the inverse of the square root of rf power. The average particle charge q-17 000e is effectively independent of rf power. These results are consistent with an electron temperature that is independent of rf power and an ion density that is directly proportional to rf power; where the Debye length is determined by the ion density in combination with the electron temperature. © 2009 American Institute of Physics;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Journal article (JA)
引用
收藏
相关论文
共 50 条
  • [21] Space and phase resolved plasma parameters in an industrial dual-frequency capacitively coupled radio-frequency discharge
    Schulze, J.
    Gans, T.
    O'Connell, D.
    Czarnetzki, U.
    Ellingboe, A. R.
    Turner, M. M.
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2007, 40 (22) : 7008 - 7018
  • [22] Discharge parameters of PlasmaKristall-4BU: A modifiable dusty plasma experiment
    Schmidt, J.
    Hyde, T. W.
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2020, 91 (08):
  • [23] Measurements of plasma parameters in capacitively coupled radio frequency plasma from discharge characteristics: Correlation with optical emission spectroscopy
    Bora, B.
    Bhuyan, H.
    Favre, M.
    Wyndham, E.
    Chuaqui, H.
    Wong, C. S.
    CURRENT APPLIED PHYSICS, 2013, 13 (07) : 1448 - 1453
  • [24] Control of plasma parameters in sheet-shaped electron cyclotron resonance heating plasma supplemented with radio frequency discharge
    Shibata, K
    Yugami, N
    Nishida, Y
    Miyazaki, T
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1996, 67 (04): : 1502 - 1507
  • [25] Structural properties of dusty plasma in direct current and radio frequency gas discharges
    Ramazanov, T. S.
    Dzhumagulova, K. N.
    Jumabekov, A. N.
    Dosbolayev, M. K.
    PHYSICS OF PLASMAS, 2008, 15 (05)
  • [26] Convection in a dusty radio-frequency plasma under the influence of a thermal gradient
    Schwabe, M.
    Hou, L-J
    Zhdanov, S.
    Ivlev, A. V.
    Thomas, H. M.
    Morfill, G. E.
    NEW JOURNAL OF PHYSICS, 2011, 13
  • [27] Dusty radio frequency discharges in argon
    Chutov, YI
    Goedheer, WJ
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 2003, 31 (04) : 606 - 613
  • [28] Ion kinetic energy distributions and their relationship to fundamental plasma parameters in a radio frequency glow discharge source
    Clemson Univ, Clemson, United States
    Spectrochim Acta Part B At Spectrosc, 11 (1627-1644):
  • [29] Effect of Glow Discharge Parameters on the Mean Interparticle Distance in Dusty Plasma Structures in the Cryogenic–Room Temperature Range
    A. V. Timofeev
    V. S. Nikolaev
    Journal of Experimental and Theoretical Physics, 2019, 128 : 312 - 322
  • [30] Ion kinetic energy distributions and their relationship to fundamental plasma parameters in a radio frequency glow discharge source
    Christopher, SJ
    Ye, YC
    Marcus, RK
    SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1997, 52 (11) : 1627 - 1644
12345