Modeling and compound control of bellows-driven ultra-precision positioning stage

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[1] Tian, Yan-Bing
[2] Wang, Tao
[3] Wang, Mei-Ling
[4] Zhang, Dong
来源：
Tian, Y.-B. | 1600年 / Editorial Department of Electric Machines and Control卷 / 18期
关键词：
Precision engineering;
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