Monte Carlo simulation study of scanning electron microscopy images of rough surfaces

被引：0
|
作者：
Li, Y.G. [1 ]
Mao, S.F. [1 ]
Li, H.M. [2 ]
Xiao, S.M. [1 ]
Ding, Z.J. [1 ]
机构：
[1] Hefei National Laboratory for Physical Sciences at Microscale, Department of Physics, University of Science and Technology of China, Hefei, Anhui 230026, China
[2] USTC-HP Laboratory of High Performance Computing, University of Science and Technology of China, Hefei 230026, Anhui, China
来源：
Journal of Applied Physics | 2008年 / 104卷 / 06期
关键词：
55;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Journal article (JA)
引用
收藏
相关论文
共 50 条
  • [1] Monte Carlo simulation study of scanning electron microscopy images of rough surfaces
    Li, Y. G.
    Mao, S. F.
    Li, H. M.
    Xiao, S. M.
    Ding, Z. J.
    [J]. JOURNAL OF APPLIED PHYSICS, 2008, 104 (06)
  • [2] A MONTE CARLO SIMULATION OF SECONDARY ELECTRON AND BACKSCATTERED ELECTRON IMAGES IN SCANNING ELECTRON MICROSCOPY
    H.M. Li and Z.J. Ding Hefei National Laboratory for Physical Sci ences at Microscale and Department of Physics
    [J]. Acta Metallurgica Sinica(English Letters), 2005, (03) : 351 - 355
  • [3] Monte Carlo simulation study of scanning Auger electron images
    Li, Y. G.
    Ding, Z. J.
    Zhang, Z. M.
    [J]. JOURNAL OF APPLIED PHYSICS, 2009, 106 (02)
  • [4] A Monte Carlo simulation study on the image resolution in scanning electron microscopy
    Mao, S. F.
    Ding, Z. J.
    [J]. SURFACE AND INTERFACE ANALYSIS, 2010, 42 (6-7) : 1096 - 1099
  • [5] Monte Carlo simulation of secondary electron images for real sample structures in scanning electron microscopy
    Zhang, P.
    Wang, H. Y.
    Li, Y. G.
    Mao, S. F.
    Ding, Z. J.
    [J]. SCANNING, 2012, 34 (03) : 145 - 150
  • [6] Monte Carlo simulation of scanning electron microscopy bright contrast images of suspended carbon nanofibers
    Suzuki, Makoto
    Yamada, Toshishige
    Yang, Cary Y.
    [J]. APPLIED PHYSICS LETTERS, 2007, 90 (08)
  • [7] Monte Carlo simulation of secondary electron and backscattered electron images in scanning electron microscopy for specimen with complex geometric structure
    Li, HM
    Ding, ZJ
    [J]. SCANNING, 2005, 27 (05) : 254 - 267
  • [8] NUMERICAL-SIMULATION OF IMAGES OF PERFECTLY CONDUCTING ROUGH SURFACES IN SCANNING MICROSCOPY
    AGUILAR, JF
    MENDEZ, ER
    [J]. NEW METHODS IN MICROSCOPY AND LOW LIGHT IMAGING, 1989, 1161 : 286 - 296
  • [9] Monte Carlo simulation study of electron interaction with solids and surfaces
    Ding, ZJ
    Salma, K
    Li, HM
    Zhang, ZM
    Tokesi, K
    Varga, D
    Toth, J
    Goto, K
    Shimizu, R
    [J]. SURFACE AND INTERFACE ANALYSIS, 2006, 38 (04) : 657 - 663
  • [10] New Integrated Monte Carlo Code for the Simulation of High-Resolution Scanning Electron Microscopy Images for Metrology in Microlithography
    Ilguesatiroglu, Emre
    Illarionov, Alexey Yu
    Ciappa, Mauro
    Pfaeffli, Paul
    Bomholt, Lars
    [J]. METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXVIII, 2014, 9050
12345