Dimensional metrology on micro-and meso-scale

被引：0
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作者：
Sato, Osamu
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来源：
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering | 2008年 / 74卷 / 03期
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D O I：
10.2493/jjspe.74.217
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页码：217 / 221
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