Application and ultraprecision machining technology of MgO single crystal

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Key Laboratory of Precision and Non-Traditional Machining, Dalian University of Technology, Dalian 116024, China [1 ]
不详 [2 ]
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Rengong Jingti Xuebao | 2006年 / 6卷 / 1372-1377期
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摘要：
MgO single crystal has been widely used as optical part and film substrate material in the field of high temperature superconductor, aerospace and photoelectron fields owing to its excellent optical, physical and chemical properties. The surface of substrate for films deposition is required to be high precision, ultra smooth and non-destructive. However, MgO single crystal is hard, brittle and easy to cleavage material, it is necessary to investigate advanced machining technology of MgO single crystal substrate. In this paper, the present precision machining technologies of MgO substrate are discussed, and advanced precision and ultraprecision machining technologies are presented.
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