Nanocrystalline diamond films deposited by electron assisted hot filament chemical vapor deposition

被引：0
|
作者：
School of Materials Science and Engineering, Shanghai University, Shanghai 200072, China [1 ]
不详 [2 ]
机构：
来源：
J Rare Earth | 2006年 / SUPPL.卷 / 107-110期
关键词：
4;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [41] Growth of diamond thin films on SiCN underlayers by hot filament chemical vapor deposition
    Katamune, Yuki
    Mori, Hiroto
    Izumi, Akira
    THIN SOLID FILMS, 2017, 635 : 53 - 57
  • [42] Characterization of boron-doped micro- and nanocrystalline diamond films deposited by wafer-scale hot filament chemical vapor deposition for MEMS applications
    Zhang, Jingchun
    Zimmer, Jerry W.
    Howe, Roger T.
    Maboudian, Roya
    DIAMOND AND RELATED MATERIALS, 2008, 17 (01) : 23 - 28
  • [43] The Effect of Sound on Diamond Hot Filament Chemical Vapor Deposition
    Karim, Syed Md. Ihsanul
    Chowdhury, Mohammad Asaduzzaman
    Helali, Md. Maksud
    INTERNATIONAL JOURNAL OF CHEMICAL REACTOR ENGINEERING, 2009, 7
  • [44] The morphology of diamond grown by hot filament chemical vapor deposition
    Menon, PM
    Clausing, RE
    Heatherly, L
    Feigerle, CS
    DIAMOND AND RELATED MATERIALS, 1998, 7 (08) : 1201 - 1206
  • [45] Nucleation kinetics of diamond in hot filament chemical vapor deposition
    Yu, Jie
    Huang, Rong Fang
    Wen, Lishi
    Shi, Changxu
    Materials Research Bulletin, 34 (14): : 2319 - 2325
  • [46] Nucleation kinetics of diamond in hot filament chemical vapor deposition
    Yu, J
    Huang, RF
    Wen, LS
    Shi, CX
    MATERIALS RESEARCH BULLETIN, 1999, 34 (14-15) : 2319 - 2325
  • [47] Tuning the Conditions for the Deposition of Nanocrystalline Diamond by Hot Filament Chemical Vapour Deposition
    Santos, J. A.
    Ranjbar, Samaneh
    Neto, V. F.
    Ruch, D.
    Gracio, J.
    JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2012, 12 (08) : 6822 - 6827
  • [48] Influence of oxygen and nitrogen on the growth of hot-filament chemical vapor deposited diamond films
    Yu, Z.
    Karlsson, U.
    Flodström, A.
    Thin Solid Films, 1999, 342 (01): : 74 - 82
  • [49] Synthesis and characterization of sulfur-incorporated microcrystalline diamond and nanocrystalline carbon thin films by hot filament chemical vapor deposition
    S. Gupta
    B. R. Weiner
    G. Morell
    Journal of Materials Research, 2003, 18 : 363 - 381
  • [50] Synthesis and characterization of sulfur-incorporated microcrystalline diamond and nanocrystalline carbon thin films by hot filament chemical vapor deposition
    Gupta, S
    Weiner, BR
    Morell, G
    JOURNAL OF MATERIALS RESEARCH, 2003, 18 (02) : 363 - 381
12345