TiO2 thin film capacitive humidity sensor based on sol-gel technique

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[1] Pandey, Manju
[2] Saha, Debdulal
[3] Sengupta, Kamalendu
[4] Islam, S.S.
来源：
Pandey, M. (manju.pandey22@yahoo.com) | 1600年 / International Frequency Sensor Association, 46 Thorny Vineway, Toronto, ON M2J 4J2, Canada卷 / 142期
关键词：
Capacitive sensors - Coatings - Alumina - Aluminum oxide - Hydrophilicity - Emulsification - Gelation - Thickness measurement - Humidity sensors - Oxide minerals - Sol-gel process - Thin films - Titanium dioxide - Molecules;
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