TiO2 thin film capacitive humidity sensor based on sol-gel technique

被引：0
|
作者：
机构：
[1] Pandey, Manju
[2] Saha, Debdulal
[3] Sengupta, Kamalendu
[4] Islam, S.S.
来源：
Pandey, M. (manju.pandey22@yahoo.com) | 1600年 / International Frequency Sensor Association, 46 Thorny Vineway, Toronto, ON M2J 4J2, Canada卷 / 142期
关键词：
Capacitive sensors - Coatings - Alumina - Aluminum oxide - Hydrophilicity - Emulsification - Gelation - Thickness measurement - Humidity sensors - Oxide minerals - Sol-gel process - Thin films - Titanium dioxide - Molecules;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [1] Sol-gel TIO2 thin film-based sensor for lambda measurement
    Presicce, DS
    Ficarella, A
    Laforgia, D
    Francioso, L
    Rella, R
    Siciliano, P
    SENSORS AND MICROSYSTEMS, PROCEEDINGS, 2004, : 200 - 205
  • [2] A Micro Oxygen Sensor Based on a Nano Sol-Gel TiO2 Thin Film
    Wang, Hairong
    Chen, Lei
    Wang, Jiaxin
    Sun, Quantao
    Zhao, Yulong
    SENSORS, 2014, 14 (09): : 16423 - 16433
  • [3] Fabrication of TiO2 coated metallic wires by the sol-gel technique as a humidity sensor
    Gil, A.
    Fernandez, M.
    Mendizabal, I.
    Korili, S. A.
    Soto-Armananzas, J.
    Crespo-Durante, A.
    Gomez-Polo, C.
    CERAMICS INTERNATIONAL, 2016, 42 (07) : 9292 - 9298
  • [4] Electrochromic Property of Sol-Gel Derived TiO2 Thin Film for pH Sensor
    Chou, J. C.
    Liu, C. H.
    Chen, C. C.
    5TH KUALA LUMPUR INTERNATIONAL CONFERENCE ON BIOMEDICAL ENGINEERING 2011 (BIOMED 2011), 2011, 35 : 69 - +
  • [5] Structure and surface properties of anatase TiO2 thin film by sol-gel technique
    Al-Jufairi, N.
    FUNCTIONAL MATERIALS AND DEVICES, 2006, 517 : 165 - 172
  • [6] Automotive application of sol-gel TiO2 thin film-based sensor for lambda measurement
    Francioso, L
    Presicce, DS
    Taurino, AM
    Rella, R
    Siciliano, P
    Ficarella, A
    SENSORS AND ACTUATORS B-CHEMICAL, 2003, 95 (1-3) : 66 - 72
  • [7] Low Temperature Acetone Sensor Based on Sol-gel Grown Nano TiO2 Thin Film
    Bhowmik, Basanta
    Dutta, Koushik
    Banerjee, Nabaneeta
    Hazra, Arnab
    Bhattacharyya, Partha
    2013 IEEE INTERNATIONAL CONFERENCE ON EMERGING TRENDS IN COMPUTING, COMMUNICATION AND NANOTECHNOLOGY (ICE-CCN'13), 2013, : 553 - 557
  • [8] Nanostructured Zinc Oxide Thin Film Based Humidity Sensor Prepared by Sol-Gel Immersion Technique
    Awalludin, M.
    Mamat, M. H.
    Sahdan, M. Z.
    Mohamad, Z.
    Rusop, M.
    NANOSYNTHESIS AND NANODEVICE, 2013, 667 : 553 - 557
  • [9] Annealing Effect of Sol-gel TiO2 Thin Film on pH-EGFET Sensor
    Yao, Pin-Chuan
    Lee, Ming-Chih
    Chiang, Jung-Lung
    2014 INTERNATIONAL SYMPOSIUM ON COMPUTER, CONSUMER AND CONTROL (IS3C 2014), 2014, : 577 - 580
  • [10] Antibacteria characteristics of sol-gel deduced TiO2 thin film
    Fang, Xiangyi
    Cheng, Xiangming
    Wu, Mingtang
    Hing, Peter
    Tien, Oh Joo
    Hsi-An Chiao Tung Ta Hsueh/Journal of Xi'an Jiaotong University, 2001, 35 (10): : 1085 - 1088
12345