Growth of vanadium dioxide films by DC reactive magnetron sputtering

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作者：
Center of Vacuum Technology and Application, School of Machinery and Automobile Engineering, Hefei University of Technology, Hefei 230009, China [1 ]
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Zhenkong Kexue yu Jishu Xuebao | 2008年 / 2卷 / 153-158期
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Oxide films;
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