Study on the polishing of GaAs wafer using nano-sized abrasives

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作者：
Department of Material and Engineering, Jiangsu Polytechnic University, Changzhou 213016, China [1 ]
不详 [2 ]
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来源：
Guti Dianzixue Yanjiu Yu Jinzhan | 2006年 / 4卷 / 555-559期
关键词：
Chemical mechanical polishing;
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