Effect of target-to-substrate distance on the properties of zirconium-doped zinc oxide transparent conductive films

被引：0
|
作者：
Zhang, Hua-Fu [1 ]
Chen, Qin-Sheng [1 ]
Liu, Han-Fa [1 ]
机构：
[1] School of Science, Shandong University of Technology, Zibo 255049, China
来源：
Rengong Jingti Xuebao/Journal of Synthetic Crystals | 2010年 / 39卷 / 06期
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摘要：
14
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页码：1412 / 1416
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