Structure and properties of La0.5Sr0.5 CoO3 /Pb(Zr0.4 Ti0.6)O3 /La0.5Sr0.5 CoO3 ferroelectric capacitor

被引：0
|
作者：
Chen, Jiang-En [1 ,2 ]
Liu, Bao-Ting [1 ]
Sun, Jie [1 ,2 ]
Guo, Yan-Ling [2 ]
Ma, Lei [2 ]
Lou, Jian-Zhong [2 ]
Peng, Ying-Cai [2 ]
机构：
[1] College of Physics Science and Technology, Hebei University, Baoding 071002, China
[2] College of Electronic and Information Engineering, Hebei University, Baoding 071002, China
来源：
Rengong Jingti Xuebao/Journal of Synthetic Crystals | 2010年 / 39卷 / 02期
关键词：
Strontium titanates - Pulsed laser deposition - Magnetron sputtering - Epitaxial films - Ferroelectricity - Binary alloys - Ferroelectric films;
D O I：
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学科分类号：
摘要：
La0.5Sr0.5CoO3(70 nm)/Pb(Zr0.4Ti0.6)O3 (70 nm)/La0.5Sr0.5CoO3(70 nm) (LSCO/PZT/LSCO) capacitor was fabricated on SrTiO3(001) substrate by RF magnetron sputtering and pulsed laser deposition (PLD) method. X-ray diffraction (XRD) shows that both LSCO and PZT thin films are epitaxial structures. It is found that the coercive voltage, remnant polarization, leakage current density and the maximum dielectric constant of LSCO/PZT/LSCO capacitor measured at the voltage of 5 V are 0.49 V, 41.7 μC/cm2, 1.97 × 10-5 A/cm2, 1073, respectively. Leakage current density of the LSCO/PZT/LSCO capacitor is further investigated, which meets ohmic behavior at lower voltage( 0.6 V).
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页码：350 / 354
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