Summary of algorithms for white-light scanning interferometry

被引:0
|
作者
Yang, Tian-Bo [1 ]
Guo, Hong [1 ]
Li, Da-Cheng [1 ]
机构
[1] State Key Laboratory Precision Measurement Technology and Instrument, Tsinghua University, Beijing 100084, China
来源
Guangxue Jishu/Optical Technique | 2006年 / 32卷 / 01期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
页码:115 / 117
相关论文
共 50 条
  • [31] Radiofrequency detection of white-light interferometry
    Coisson, R.
    Guangdianzi Jiguang/Journal of Optoelectronics Laser, 9 : 236 - 237
  • [32] White-light interferometry with depolarization of the radiation
    Alekseev, EI
    Bazarov, EN
    TECHNICAL PHYSICS LETTERS, 1997, 23 (07) : 560 - 561
  • [33] BEAMSPLITTER CUBE FOR WHITE-LIGHT INTERFEROMETRY
    FARR, KB
    GEORGE, N
    OPTICAL ENGINEERING, 1992, 31 (10) : 2191 - 2196
  • [34] Recent trends in white-light interferometry
    Kitagawa, Katsuichi
    TWO- AND THREE-DIMENSIONAL METHODS FOR INSPECTION AND METROLOGY IV, 2006, 6382
  • [35] Dispersion measurements with white-light interferometry
    Diddams, S
    Diels, JC
    JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1996, 13 (06) : 1120 - 1129
  • [36] White-light interferometry via an endoscope
    Lindner, MW
    INTERFEROMETRY XI: TECHNIQUES AND ANALYSIS, 2002, 4777 : 90 - 101
  • [37] Sampling Theory in White-Light Interferometry
    H. Ogawa
    A. Hirabayashi
    Sampling Theory in Signal and Image Processing, 2002, 1 (2): : 87 - 116
  • [38] Improvement of lateral resolution and reduction of batwings in vertical scanning white-light interferometry
    Niehues, Jan
    Lehmann, Peter
    OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION VII, 2011, 8082
  • [39] Robust Vertical Scanning White-light Interferometry in Close-to-Machine Applications
    Tereschenko, Stanislav
    Lehmann, Peter
    Gollor, Pascal
    Kuehnhold, Peter
    OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION IX, 2015, 9525
  • [40] HIGH-SPEED NONCONTACT PROFILER BASED ON SCANNING WHITE-LIGHT INTERFEROMETRY
    DECK, L
    DEGROOT, P
    INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE, 1995, 35 (02): : 147 - 150