Sustainable vapor-phase deposition and applications of MOF films and membranes: A critical review

Efficient and eco-friendly processing of thin films and membranes is crucial for the scalable production and application of emerging metal-organic frameworks (MOFs). Unlike conventional methods, vapor-phase deposition is increasingly recognized as a promising green technique for sustainably micro- and nano-fabricating thin films and membranes by largely eliminating the use of solvents. This review underscores the significance and recent progress of emerging vapor-phase deposition techniques such as physical vapor deposition (PVD), chemical vapor deposition (CVD), atomic layer deposition (ALD), molecular layer deposition (MLD), and related coupled techniques for their efficacy in sustainably producing uniform MOF thin films and membranes. These methods offer distinct advantages for applications in semiconductor devices, microdevices, and gas separation. This review herein focuses on the working principles and development milestones of vapor-phase deposition techniques in the rational design and sustainable fabrication of MOF films and membranes, highlighting innovative synthesis strategies and advanced applications, particularly in gas separation.