Doping and electrics characterization of c-BN thin film

被引:0
|
作者
School of Applied Mathematics and Physics, Beijing University of Technology, Beijing 100022, China [1 ]
不详 [2 ]
机构
来源
Gongneng Cailiao | 2006年 / SUPPL.卷 / 279-280+284期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [1] Modeling of c-BN thin film deposition
    Kulisch, W
    Reinke, S
    DIAMOND FILMS AND TECHNOLOGY, 1997, 7 (02): : 105 - 138
  • [2] Europium doping of c-BN and ta-C thin films
    Vetter, U
    Reinke, P
    Ronning, C
    Hofsäss, H
    Schaaf, P
    Bharuth-Ram, K
    Taniguchi, T
    DIAMOND AND RELATED MATERIALS, 2003, 12 (3-7) : 1182 - 1185
  • [3] Synthesis and characterization of c-BN film by triode sputtering
    Mortet, V.
    Djouadi, M.A.
    Lambertin, M.
    Thierry, B.
    Vide: Science, Technique et Applications, 2000, 3
  • [4] Interface characterization and delamination mechanism of c-BN film
    Kim, IH
    Sung, C
    Lee, SR
    Seo, YW
    INTERFACIAL ENGINEERING FOR OPTIMIZED PROPERTIES, 1997, 458 : 443 - 448
  • [5] Study of preparation of c-BN thin film in normal temperature
    Zhang, CY
    Zhong, XL
    Ren, HA
    Wang, JB
    Yang, GW
    MECHANICS AND MATERIAL ENGINEERING FOR SCIENCE AND EXPERIMENTS, 2001, : 312 - 315
  • [6] Gradient interface layers to improve c-BN thin film adhesion
    Freudenstein, R
    Reinke, S
    Kulisch, W
    Fischer, R
    Zweck, J
    Bergmaier, A
    Dollinger, G
    TRENDS AND NEW APPLICATIONS OF THIN FILMS, 1998, 287-2 : 259 - 262
  • [7] Processing and characterization of CVD c-BN films and c-BN/diamond bilayers
    Yang, TS
    Cheng, JB
    Wong, MS
    SURFACE ENGINEERING 2002-SYNTHESIS, CHARACTERIZATION AND APPLICATIONS, 2003, 750 : 183 - 192
  • [8] Characterization of interface of c-BN film deposited on silicon(100) substrate
    Tian, JZ
    Xia, LF
    Ma, XX
    Sun, Y
    Byon, ES
    Lee, SH
    Lee, SR
    THIN SOLID FILMS, 1999, 355 : 229 - 232
  • [9] Characterization of interface of c-BN film deposited on silicon(100) substrate
    Tian, Jingze
    Xia, Lifang
    Ma, Xinxin
    Sun, Yue
    Byon, Eung-Sun
    Lee, Sung-Hun
    Lee, Sang-Ro
    Thin Solid Films, 1999, 355 : 229 - 232
  • [10] Grain boundary structure of c-BN thin film synthesized by PVD method
    Zhou, WL
    Ikuhara, Y
    MATERIALS TRANSACTIONS JIM, 1996, 37 (05): : 1122 - 1126