Investigation of compositional gradient phase change SixSb 2Te3 thin films

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作者：
Zhang, Ting [2 ]
Song, Zhitang [1 ]
Liu, Bo [1 ]
Feng, Songlin [1 ]
Chen, Bomy [3 ]
机构：
[1] Laboratory of Nanotechnology, Shanghai Institute of Micro-System and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
[2] Graduate School, Chinese Academic of Sciences, Beijing 100049, China
[3] Silicon Storage Technology, Inc., 1171 Sonora Court, Sunnyvale, CA 94086, United States
来源：
Japanese Journal of Applied Physics, Part 2: Letters | 2007年 / 46卷 / 1-3期
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