Fabrication of a novel MEMS capacitive microphone using lateral slotted diaphragm

被引：0
|
作者：
Ganji, B.A. [1 ]
Nateri, M.S. [1 ]
机构：
[1] Department of Electrical Engineering, Babol University of Technology, 484 Babol, Iran
来源：
International Journal of Engineering, Transactions B: Applications | 2010年 / 23卷 / 3-4期
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D O I：
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摘要：
14
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页码：191 / 200
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