Solar selective absorbing coating prepared by multi-grade nitrogen ions implantation

Solar selective absorbing coating was prepared by ion implantation. With the theory that ions concentration in portrait after multi-implantation shows gradient distribution, multi-grade N ions implantations of three different schemes were used on Ti film deposited on Al surface. The absorptance and emittance of samples were tested and compared, surface composition were studied by XRD, we also analyzed distribution of elements in profile by AES, tested adhesive attraction by bending samples repeatedly. The results showed that the absorptance of the coating is above 0.94 but emissivity all some high. The coating with the best solar selective absorption whose α is 0.95 and Ε is 0.21 contained TiN0.9, TiN0.6O0.4, Al2Ti, Al3Ti, etc, N ions concentration is gradient descent from the most surface to aluminum substrate, and the coating adhesive ability with substrate is well.