Rapid calculation of the ion energy distribution on a plasma electrode

被引:0
|
作者
机构
[1] Diomede, Paola
[2] Economou, Demetre J.
[3] Donnelly, Vincent M.
来源
Diomede, P. (padiomede@gmail.com) | 1600年 / American Institute of Physics Inc.卷 / 111期
关键词
Ions;
D O I
暂无
中图分类号
学科分类号
摘要
Journal article (JA)
引用
收藏
相关论文
共 50 条
  • [41] RAPID PROCEDURES FOR THE SOLUTION OF FIELD PROBLEMS AND THEIR APPLICATION IN THE CALCULATION OF TEMPERATURE DISTRIBUTION IN A CURRENT-CONDUCTING ELECTRODE
    SCHLEIFF, M
    CHEMISCHE TECHNIK, 1983, 35 (11): : 602 - 602
  • [42] ADAPTATION OF A PROGRAM FOR DEPTH DISTRIBUTION OF ENERGY DEPOSITION BY ION-BOMBARDMENT - CALCULATION OF ION LATERAL RANGES
    MANNING, I
    ROSEN, M
    WESTMORELAND, JE
    COMPUTER PHYSICS COMMUNICATIONS, 1976, 12 (03) : 335 - 338
  • [43] The measurement and control of the ion energy distribution function at a surface in an RF plasma
    Barton, D
    Heason, DJ
    Short, RD
    Bradley, JW
    MEASUREMENT SCIENCE AND TECHNOLOGY, 2000, 11 (12) : 1726 - 1731
  • [44] Plasma sheath model and ion energy distribution for all radio frequencies
    Panagopoulos, T
    Economou, DJ
    JOURNAL OF APPLIED PHYSICS, 1999, 85 (07) : 3435 - 3443
  • [45] Ion energy distribution measurements in rf and pulsed dc plasma discharges
    Gahan, D.
    Daniels, S.
    Hayden, C.
    Scullin, P.
    O'Sullivan, D.
    Pei, Y. T.
    Hopkins, M. B.
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2012, 21 (02):
  • [46] Modeling of incident particle energy distribution in plasma immersion ion implantation
    Tian, XB
    Kwok, DTK
    Chu, PK
    JOURNAL OF APPLIED PHYSICS, 2000, 88 (09) : 4961 - 4966
  • [47] Energy distribution of boron ions during plasma immersion ion implantation
    Qin, Shu
    Chan, Chung
    McGruer, Nicol E.
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 1992, 1 (01): : 1 - 6
  • [48] Peculiarities of measuring ion energy distribution in plasma with a retarding field analyzer
    Bardakov, V. M.
    Ivanov, S. D.
    Kazantsev, A. V.
    Strokin, N. A.
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2015, 86 (05):
  • [49] A PLASMA ION GUN WITH PIERCE ELECTRODE
    TAMURA, H
    KIMURA, H
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1966, 5 (10) : 985 - &
  • [50] CALCULATION OF PLASMA PROPERTIES IN ION SOURCES
    BROPHY, JR
    WILBUR, PJ
    AIAA JOURNAL, 1986, 24 (09) : 1516 - 1523