Sensitivity of porous silicon rugate filters for chemical vapor detection

被引：0
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作者：
Salem, M.S. [1 ]
Sailor, M.J. [2 ]
Fukami, K. [1 ]
Sakka, T. [1 ]
Ogata, Y.H. [1 ]
机构：
[1] Institute of Advanced Energy, Kyoto University, Uji, Kyoto 611-0011, Japan
[2] Department of Chemistry and Biochemistry, University of California at San Diego, CA 92039-0358, United States
来源：
Journal of Applied Physics | 2008年 / 103卷 / 08期
关键词：
The characteristics of chemical vapor sensors constructed from porous Si rugate filters are examined. The peak position of the resonant wavelength exhibits a redshift response upon exposure to ethanol vapors. The filter response scales with the vapor partial pressure; the concentration level is estimated based on theoretical calculations. The formation of two stacked rugate filters with similar index contrast but different periodicities is used to test the extent of liquid infiltration into each individual filter. The penetration length of the condensate is found to be comparable to the thickness of the filter; in a 11.3-μm -thick filter; a steady-state response is achieved in 4 min. © 2008 American Institute of Physics;
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