Ultrashort pulse laser micromachined microchannels and their application in an optical switch

被引：0

作者：

Zheng, H.Y. ^{[1
]}

Liu, H. ^{[1
]}

Wan, S. ^{[1
]}

Lim, G.C. ^{[1
]}

Nikumb, S. ^{[2
]}

Chen, Q. ^{[2
]}

机构：

[1] Singapore Institute of Manufacturing Technology, 71 Nanyang Drive, Singapore 638075, Singapore

[2] Integrated Manufacturing Technologies Institute, National Research Council of Canada, 800 Collip Circle, London, Ont. N6G 4X8, Canada

来源：

International Journal of Advanced Manufacturing Technology | 2006年 / 27卷 / 9-10期

关键词：

The capability of direct writing makes ultrashort pulse laser significant in the microfabrication of MEMS devices based on polymer and glass. In particular; nanosecond and femtosecond lasers are able to transfer the adequate energy in femtosecond intervals for the removal of the materials. Because of its advantages; just like the small feature size; smooth finishing surface; flexible structuring and the minimum thermal effect; ultrashort pulse lasers have become a convincing technique with the high peak power. This paper presents the femtosecond laser machining results of the polycarbonate; aluminosilicate glasses and nanosecond laser machining of aluminosilicate glasses. The microchannels with the critical micron-scale dimensions and the sub-micron scale surface roughness were achieved by the optimized operating parameters of the laser. The major influence factors such as cutting speed; power energy; and power stability were analyzed to obtain the optimized parameters for the fabrication of the microchannels for a bubble switch. The ultrashort pulse laser micromachining was applied in the prototype of a bubble optical switch. By miniaturization of the structure of the microchannel; the switch speed can be promisingly improved;

D O I：

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摘要：

Journal article (JA)

引用

页码：925 / 929

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