Technical paper: Simulation model for an EB-PVD coating structure using the level set method

被引:5
|
作者
Marcus Department of Industrial and Manufacturing Engineering, Penn State University, University Park, PA 16802, United States [1 ]
机构
来源
J. Manuf. Processes | 2009年 / 1卷 / 1-7期
关键词
Coatings - Numerical methods - Physical vapor deposition - Finite element method - MATLAB - Drop breakup - Level measurement - Yttria stabilized zirconia;
D O I
10.1016/j.jmapro.2009.05.001
中图分类号
学科分类号
摘要
A comprehensive modeling approach to link machine dynamics, deposition, and substrate kinematics in an electron beam physical vapor deposition (EB-PVD) is presented in this paper. The machine dynamics in EB-PVD process are captured by finite element models, resulting in the prediction of evaporation rate and vapor distribution. The deposition process is modeled using the level set method, which is one of the computational techniques for tracking topographic evolution. The proposed simulation model is implemented in Matlab and is compared with experimental results published by other researchers. Results indicate that the proposed simulation model can be used to predict microstructure features such as zigzag and helical columnar shapes. The pitch of a zigzag microstructure can be predicted within 20% at the 0.3 to 6 μm level for Yttira-stabilized Zirconia (YSZ) coating. © 2009 The Society of Manufacturing Engineers. Published by Elsevier Ltd. All rights reserved.
引用
收藏
相关论文
共 50 条
  • [41] Simulation and inverse modeling of TEOS deposition processes using a fast level set method
    Heitzinger, C
    Fugger, J
    Häberlen, O
    Selberherr, S
    SISPAD 2002: INTERNATIONAL CONFERENCE ON SIMULATION OF SEMICONDUCTOR PROCESSES AND DEVICES, 2002, : 191 - 194
  • [42] Numerical simulation of the polymer crystallization during cooling stage by using level set method
    Liu, Z. J.
    Ouyang, J.
    Zhou, W.
    Wang, X. D.
    COMPUTATIONAL MATERIALS SCIENCE, 2015, 97 : 245 - 253
  • [43] A full-Eulerian solid level set method for simulation of fluid-structure interactions
    He, Ping
    Qiao, Rui
    MICROFLUIDICS AND NANOFLUIDICS, 2011, 11 (05) : 557 - 567
  • [44] Numerical simulation of RTM process using the extended finite element method combined with the level set method
    Jung, Yeonhee
    Kim, Seung Jo
    Han, Woo-Suck
    JOURNAL OF REINFORCED PLASTICS AND COMPOSITES, 2013, 32 (05) : 308 - 317
  • [45] A single step ice accretion model using Level-Set method
    Pena, Dorian
    Hoarau, Yannick
    Laurendeau, Eric
    JOURNAL OF FLUIDS AND STRUCTURES, 2016, 65 : 278 - 294
  • [46] Medical image segmentation using level set method and generalized linear model
    Zhang, Gang
    Ma, Liang
    Liu, Shujuan
    Fang, Lingling
    Guo, Dongmei
    BASIC & CLINICAL PHARMACOLOGY & TOXICOLOGY, 2019, 125 : 52 - 53
  • [47] Modelling of water removal during a paper vacuum dewatering process using a Level-Set method
    Rezk, Kamal
    Nilsson, Lars
    Forsberg, Jan
    Berghel, Jonas
    CHEMICAL ENGINEERING SCIENCE, 2013, 101 : 543 - 553
  • [48] Finite element simulation of impulse wave generated by landslides using a three-phase model and the conservative level set method
    Zhao, Lanhao
    Mao, Jia
    Bai, Xin
    Liu, Xiaoqing
    Li, Tongchun
    Williams, J. J. R.
    LANDSLIDES, 2016, 13 (01) : 85 - 96
  • [49] Finite element simulation of impulse wave generated by landslides using a three-phase model and the conservative level set method
    Lanhao Zhao
    Jia Mao
    Xin Bai
    Xiaoqing Liu
    Tongchun Li
    J. J. R. Williams
    Landslides, 2016, 13 : 85 - 96
  • [50] Three-dimensional topography simulation for deposition and etching processes using a level set method
    Sheikholeslami, A
    Heitzinger, C
    Grasser, T
    Selberherr, S
    2004 24TH INTERNATIONAL CONFERENCE ON MICROELECTRONICS, PROCEEDINGS, VOLS 1 AND 2, 2004, : 241 - 244