In situ monitoring of X-ray strain pole figures of a biaxially deformed ultra-thin film on a flexible substrate

被引：0
|
作者：
机构：
[1] Geandier, G.
[2] Faurie, D.
[3] Renault, P.-O.
[4] Thiaudière, D.
[5] Le Bourhis, E.
来源：
Faurie, D. (faurie@univ-paris13.fr) | 1600年 / International Union of Crystallography, 5 Abbey Road, Chester, CH1 2HU, United Kingdom卷 / 47期
关键词：
X-ray strain pole figures (SPFs) have been captured in situ during biaxial deformation of a gold ultra-thin film (thickness = 40 nm) deposited on a polymer substrate. An area detector was used to extract one line in the reciprocal space while the strained sample was rotated azimuthally step by step to produce the SPF. Such SPFs have been obtained for a textured anisotropic ultra-thin film under controlled non-equibiaxial loading using the SOLEIL synchrotron DIFFABS tensile device. The experimental setup allows the pole figure measurements of {111} and {200} reflections to be performed simultaneously. Interestingly; those two crystallographic directions are related to the two-extreme elastic mechanical behaviour. The full directional lattice strain dependence (SPF) is obtained within 15 min and can be monitored step by step upon loading. This procedure gives an insight into ultra-thin film mechanical response under complex biaxial loading. © 2014 International Union of Crystallography;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Conference article (CA)
引用
收藏
相关论文
共 50 条
  • [21] Backside Analysis of Ultra-Thin Film Stacks in Microelectronics Technology Using X-ray Photoelectron Spectroscopy
    Hantschel, Thomas
    Demeulemeester, Cindy
    Suderie, Arnaud
    Lacave, Thomas
    Conard, Thierry
    Vandervorst, Wilfried
    ELECTRON CRYSTALLOGRAPHY FOR MATERIALS RESEARCH AND QUANTITATIVE CHARACTERIZATION OF NANOSTRUCTURED MATERIALS, 2009, 1184 : 185 - 190
  • [22] Measurement of poisson’s ratio of a thin film on a substrate by combining x-ray diffraction with in situ substrate bending
    Ho-Young Lee
    Su-Jeong Suh
    Sung-Ryong Kim
    Se-Young Park
    Young-Chang Joo
    Electronic Materials Letters, 2009, 5 : 51 - 54
  • [23] Measurement of Poisson's Ratio of a Thin Film on a Substrate by Combining X-Ray Diffraction with in situ Substrate Bending
    Lee, Ho-Young
    Suh, Su-Jeong
    Kim, Sung-Ryong
    Park, Se-Young
    Joo, Young-Chang
    ELECTRONIC MATERIALS LETTERS, 2009, 5 (01) : 51 - 54
  • [24] Performance and Properties of Ultra-Thin Silicon Nitride X-ray Windows
    Torma, Pekka T.
    Kostamo, Jari
    Sipila, Heikki
    Mattila, Marco
    Kostamo, Pasi
    Kostamo, Esa
    Lipsanen, Harri
    Laubis, Christian
    Scholze, Frank
    Nelms, Nick
    Shortt, Brian
    Bavdaz, Marcos
    IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 2014, 61 (01) : 695 - 699
  • [25] An X-ray photoelectron spectroscopy study of ultra-thin oxynitride films
    Ladas, S.
    Sygellou, L.
    Kennou, S.
    Wolf, M.
    Roeder, G.
    Nutsch, A.
    Rambach, M.
    Lerch, W.
    THIN SOLID FILMS, 2011, 520 (02) : 871 - 875
  • [26] X-ray studies of ultra-thin Si wafers for mirror application
    Sass, J.
    Mazur, K.
    Surma, B.
    Eichhorn, F.
    Litwin, D.
    Galas, J.
    Sitarek, S.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2006, 253 (1-2): : 236 - 240
  • [27] Ultra-thin freestanding diamond window for soft X-ray optics
    Ying, XT
    Luo, JL
    Wang, PN
    Cui, MQ
    Zhao, YD
    Li, G
    Zhu, PP
    DIAMOND AND RELATED MATERIALS, 2003, 12 (3-7) : 719 - 722
  • [28] Mapping local strain in thin film/substrate systems using x-ray microdiffraction topography
    Yan, Hanfei
    Murray, Conal E.
    Noyan, I. C.
    APPLIED PHYSICS LETTERS, 2007, 90 (09)
  • [29] X-RAY STANDING WAVES IN LSM FOR CHARACTERIZATION OF ULTRA-THIN FILMS
    ZHELUDEVA, SI
    KOVALCHUK, MV
    NOVIKOVA, NN
    SOSPHENOV, AN
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1993, 26 (4A) : A206 - A209
  • [30] Grazing incidence X-ray studies of ultra-thin Lumogen films
    Keough, S. J.
    Hanley, T. L.
    Wedding, A. B.
    Quinton, J. S.
    SURFACE SCIENCE, 2007, 601 (24) : 5744 - 5749
12345