Research on MEMS ultrasonic separator's model based on two-dimensional normal vibration modes

被引：0
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作者：
Xiao, Xi-Yuan [1 ]
Ding, Jie-Xiong [1 ]
Wang, Yu-Xiang [1 ]
机构：
[1] School of Mechatronics Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China
来源：
Yadian Yu Shengguang/Piezoelectrics and Acoustooptics | 2008年 / 30卷 / 06期
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页码：708 / 711
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