Effect of NO2 Gas Adsorption on Electrical Properties of Pyrolyzed Polymer

被引：0
|
作者：
Naka, Keisuke [1 ,2 ]
Hashishin, Takeshi [1 ,2 ]
Tamaki, Jun [1 ,2 ]
Konishi, Satoshi [1 ,2 ]
机构：
[1] Ritsumeikan University, 1-1-1, Noji-higashi, Kusatsu, Shiga 525-8577, Japan
[2] Ritsumeikan University, Japan
来源：
IEEJ Transactions on Sensors and Micromachines | 2007年 / 127卷 / 04期
关键词：
Carbon - Chemical sensors - Electric properties - Gas adsorption - Micromachining - Nitrogen oxides - Pyrolysis;
D O I：
10.1541/ieejsmas.127.228
中图分类号：
学科分类号：
摘要：
This paper deals with a pyrolyzed polymer as a kind of carbon materials obtained by pyrolysis of polymers. Through a combination of micromachining of polymers and following pyrolysis process, we can obtain pyrolyzed polymer MEMS structures for various applications. This work focuses on the effect of NO 2 gas adsorption on electrical properties of pyrolyzed polymers. The resistance of the sensor is dramatically decreased when the sensor is exposed to the NO2 gas. It is found that low pyrolysis temperature and high operating temperature contribute to higher sensitivity against gas mixture of NO2.
引用
收藏
页码：228 / 233
相关论文
共 50 条
  • [31] Electrical properties of pyrolyzed polypyrrolone film under pressure
    Piao, MJ
    Wan, MX
    Lu, FC
    Liu, ZX
    SOLID STATE COMMUNICATIONS, 1996, 98 (08) : 733 - 736
  • [32] NO2 ADSORPTION ON NI(100) - A COMPARISON OF NO2 WITH CO2 ADSORPTION
    GEISLER, H
    ODORFER, G
    ILLING, G
    JAEGER, R
    FREUND, HJ
    WATSON, G
    PLUMMER, EW
    NEUBER, M
    NEUMANN, M
    SURFACE SCIENCE, 1990, 234 (03) : 237 - 250
  • [33] Effect of indium-doped SnO2 nanoparticles on NO2 gas sensing properties
    Kaur, Jaswinder
    Kumar, Rajesh
    Bhatnagar, M. C.
    SENSORS AND ACTUATORS B-CHEMICAL, 2007, 126 (02) : 478 - 484
  • [34] NO2 EFFECT ON FLUE-GAS OPACITY
    LINDAU, L
    JOURNAL OF THE AIR & WASTE MANAGEMENT ASSOCIATION, 1991, 41 (08): : 1098 - 1098
  • [35] SYNTHESIS OF GO-PEDOT:PSS NANOCOMPOSITES AND STUDY OF THEIR ELECTRICAL PROPERTIES FOR NO2 GAS SENSOR APPLICATION
    Kadhim, Mohammed Jawad
    Hadi, Noor Raed
    Mohammed, Safa H.
    Mohammed, Mustafa K. A.
    SURFACE REVIEW AND LETTERS, 2022, 29 (11)
  • [36] Sensing Properties of Gas Sensor Based on Adsorption of NO2 with Defect, Pristine, Fe and Si-MoS2 Layer
    Shakil, S. R.
    Khan, S. A.
    JOURNAL OF NANO- AND ELECTRONIC PHYSICS, 2014, 6 (04)
  • [37] Effect of Oxygen Adsorption on Electrical and Thermoelectrical Properties of Monolayer MoS2
    Deb, Swarup
    Bhattacharyya, Pritam
    Chakrabarti, Poulab
    Chakraborti, Himadri
    Das Gupta, Kantimay
    Shukla, Alok
    Dhar, Subhabrata
    PHYSICAL REVIEW APPLIED, 2020, 14 (03)
  • [38] The effect of NO2 doping on the gas sensing properties of copper phthalocyanine thin film devices
    Newton, MI
    Starke, TKH
    McHale, G
    Willis, MR
    THIN SOLID FILMS, 2000, 360 (1-2) : 10 - 12
  • [39] Adsorption of the Gas Molecules NH3, NO, NO2, and CO on Borophene
    Huang, Chieh-Szu
    Murat, Altynbek
    Babar, Vasudeo
    Montes, Enrique
    Schwingenschlogl, Udo
    JOURNAL OF PHYSICAL CHEMISTRY C, 2018, 122 (26): : 14665 - 14670
  • [40] The effect of gas adsorption on carbon nanotubes properties
    Jalili, Seifollah
    Majidi, Roya
    JOURNAL OF COMPUTATIONAL AND THEORETICAL NANOSCIENCE, 2006, 3 (05) : 664 - 669
12345