Nanostructured MOEMS for spectral control of light

被引：0
|
作者：
SBoutami [1 ]
MGarrigues [1 ]
J-LLeclercq [1 ]
XLetartre [1 ]
PViktorovitch [1 ]
机构：
[1] Institut des Nanotechnologies de Lyon (INL), UMR CNRS 5270, Ecole Centrale de Lyon-F69134, Ecully Cedex, France
来源：
International Journal of Materials and Product Technology | 2009年 / 34卷 / 04期
关键词：
D O I：
10.1504/ijmpt.2009.024996
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：384 / 398
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