Study on the key influencing factors in atmospheric pressure plasma processing of fused silica

被引:0
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作者
Li, Na [1 ]
Wang, Bo [1 ]
Jin, Hui-Liang [1 ]
机构
[1] School of Mechanical Engineering, Harbin Institute of Technology, Harbin , China
关键词
Fused silica;
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页码:124 / 128
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