Simulation and experiment for a uniplanar capacitance sensor with multi-electrode

被引：4
|
作者：
State Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, Beijing 100084, China [1 ]
机构：
来源：
Jixie Gongcheng Xuebao | 2006年 / 2卷 / 6-11期
关键词：
Sensors;
D O I：
10.3901/JME.2006.02.006
中图分类号：
学科分类号：
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