Concentric circle scanning system for largearea and high-precision imaging

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作者：
Laboratory for Manufacturing and Productivity, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge [1 ]
MA
02139, United States
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来源：
Opt. Express | / 15卷 / 20014-20029期
关键词：
Circular trajectory - Composite images - Concentric circles - Constant angular velocity - Constant linear velocities - High speed imaging systems - Nanoscale features - Transient behavior;
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