Langmuir double probe RF plasma compensation using simulation metho

被引：0
|
作者：
Azooz, Aasim A. [1 ]
Akbar, Demiral S. [2 ]
Bilikmen, Sinan [2 ]
机构：
[1] Department of Physics, College of Science, Mosul University, Jamia St. Mosul, Iraq
[2] Department of Physics, Middle east Technical University, 06531 Ankara, Turkey
来源：
Acta Technica CSAV (Ceskoslovensk Akademie Ved) | 2010年 / 55卷 / 04期
关键词：
Electromagnetic induction - Computer hardware - Radio waves - Computer software;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
A possibility of removal of radio-frequency contamination of double Langmuir probe voltage-current characteristics is investigated. Computer simulation of this contaminationindicates that the undistorted characteristics can be obtained by proper software treatment of experimental data, which eliminates the need of using filters or other hardware procedures for radio-frequency compensation purpose. User-friendly MATLABbased software performing such compensation is suggested. Experimental data obtained from double-probe measurements of inductively coupled radio-frequency plasma at several pressures, power levelsand positions are analyzed using this technique. © 2010 Institute of Thermomechanics AS CR.
引用
收藏
页码：357 / 382
相关论文
共 50 条
  • [11] PROBE SYSTEM WITH BIAS COMPENSATION USING A LASER HEATED EMISSIVE PROBE FOR RF DISCHARGE PLASMA DIAGNOSTICS
    MIZUMURA, M
    UOTSU, S
    MATSUMURA, S
    TEII, S
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1992, 25 (12) : 1744 - 1748
  • [12] Evaluation of plasma density in RF CCP discharges from ion current to Langmuir probe: experiment and numerical simulation
    Voloshin, Dmitry
    Kovalev, Alexander
    Mankelevich, Yuri
    Proshina, Olga
    Rakhimova, Tatyana
    Vasilieva, Anna
    EUROPEAN PHYSICAL JOURNAL D, 2015, 69 (01):
  • [13] Evaluation of plasma density in RF CCP discharges from ion current to Langmuir probe: experiment and numerical simulation
    Dmitry Voloshin
    Alexander Kovalev
    Yuri Mankelevich
    Olga Proshina
    Tatyana Rakhimova
    Anna Vasilieva
    The European Physical Journal D, 2015, 69
  • [14] Collected Current by a Double Langmuir Probe Setup With Plasma Flow
    Jao, Chun-Sung
    Miloch, Wojciech J.
    Miyake, Yohei
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 2024, 52 (10) : 5222 - 5233
  • [15] Measurement of Plasma Parameters in Zirconium Plasma Using Langmuir Probe
    Jana, B.
    Majumder, A.
    Baruah, S.
    Sahu, G. K.
    Thakur, K. B.
    Mago, V. K.
    Das, A. K.
    INDIAN VACUUM SOCIETY SYMPOSIUM ON THIN FILMS: SCIENCE & TECHNOLOGY, 2012, 1451 : 254 - 256
  • [16] Measurements of rf bias effect in a dual electron cyclotron resonance-rf methane plasma using the Langmuir probe method
    Hong, JG
    Granier, A
    Leteinturier, C
    Peignon, MC
    Turban, G
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2000, 18 (02): : 497 - 502
  • [17] PLASMA SIMULATION OF A LANGMUIR PROBE WITH NORMAL MAGNETIC-FIELD
    ARMSTRONG, RJ
    LILAND, KB
    TRULSEN, J
    PHYSICA D, 1992, 60 (1-4): : 160 - 164
  • [18] Simulation Inference of Plasma Parameters From Langmuir Probe Measurements
    Resendiz Lira, Pedro Alberto
    Marchand, Richard
    EARTH AND SPACE SCIENCE, 2021, 8 (03)
  • [19] COMPARISON BETWEEN RF PROBE AND LANGMUIR PROBE MEASUREMENTS
    PETER, G
    PHYSICS LETTERS A, 1967, A 25 (02) : 171 - +
  • [20] Measurement of plasma parameters in the PBI using the Langmuir probe
    Chektybayev, B. Zh.
    Skakov, M. K.
    Tulenbergenov, T. R.
    Sokolov, I. A.
    Miniyazov, A. Zh.
    Zhanbolatova, G. K.
    Nauryzbayev, R. Zh.
    FUSION ENGINEERING AND DESIGN, 2024, 205
12345