Langmuir double probe RF plasma compensation using simulation metho

被引：0
|
作者：
Azooz, Aasim A. [1 ]
Akbar, Demiral S. [2 ]
Bilikmen, Sinan [2 ]
机构：
[1] Department of Physics, College of Science, Mosul University, Jamia St. Mosul, Iraq
[2] Department of Physics, Middle east Technical University, 06531 Ankara, Turkey
来源：
Acta Technica CSAV (Ceskoslovensk Akademie Ved) | 2010年 / 55卷 / 04期
关键词：
Electromagnetic induction - Computer hardware - Radio waves - Computer software;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
A possibility of removal of radio-frequency contamination of double Langmuir probe voltage-current characteristics is investigated. Computer simulation of this contaminationindicates that the undistorted characteristics can be obtained by proper software treatment of experimental data, which eliminates the need of using filters or other hardware procedures for radio-frequency compensation purpose. User-friendly MATLABbased software performing such compensation is suggested. Experimental data obtained from double-probe measurements of inductively coupled radio-frequency plasma at several pressures, power levelsand positions are analyzed using this technique. © 2010 Institute of Thermomechanics AS CR.
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页码：357 / 382
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