Microstructures and properties of silicon nitride films grown by unbalanced magnetron sputtering

被引：0
|
作者：
Jing, Fengjuan [1 ]
Zhang, Qi [1 ]
Leng, Yongxiang [1 ]
Sun, Hong [1 ]
Yang, Ping [1 ]
Huang, Nan [1 ]
机构：
[1] Key Lab. for Advanced Technologies of Materials Ministry of Education, School of Materials Science and Engineering, Southwest Jiaotong University, Chengdu 610031, China
来源：
Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | 2009年 / 29卷 / 05期
关键词：
D O I：
10.3969/j.issn.1672-7126.2009.05.17
中图分类号：
学科分类号：
摘要：
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页码：541 / 545
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