The relationship between material properties, device design, and the sensitivity of resonant mechanical sensors

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作者：
Waggoner, Philip S. [1 ]
Craighead, Harold G. [1 ]
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[1] School of Applied Physics, Cornell University, 212 Clark Hall, Ithaca, NY 14583, United States
来源：
Journal of Applied Physics | 2009年 / 105卷 / 05期
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