Experimental study of the effect of hydrodynamic coupling of micro-cantilever array on the dynamic response of micro-cantilever

被引：0
|
作者：
Institute of NanoEngineering and MicroSystems, National Tsing Hua University, No. 101, Section 2, Kuang-Fu Road, Hsinchu, Taiwan [1 ]
不详 [2 ]
不详 [3 ]
机构：
来源：
Sens Actuators A Phys | / 1卷 / 79-85期
关键词：
Compendex;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Dynamic response
引用
收藏
相关论文
共 50 条
  • [41] Study on Resonance Frequency Detection System of Piezoelectric Micro-Cantilever
    Hu, Chang-de
    Xue, Zhi-wei
    Cao, Xiao-jun
    Liu, Jian-qiang
    2016 INTERNATIONAL CONFERENCE ON SUSTAINABLE ENERGY, ENVIRONMENT AND INFORMATION ENGINEERING (SEEIE 2016), 2016, : 133 - 138
  • [42] System tools applied to micro-cantilever based devices
    Sebastian, A
    Salapaka, S
    Salapaka, MV
    MULTIDISCIPLINARY RESEARCH IN CONTROL, 2003, 289 : 83 - 99
  • [43] On adhesion force of MEMS micro-cantilever with rough surface
    Tian, Wenchao
    Jia, Jianyuan
    Chen, Guangyan
    PROCEEDINGS OF THE 2006 IEEE INTERNATIONAL CONFERENCE ON NETWORKING, SENSING AND CONTROL, 2006, : 1096 - 1101
  • [44] Active vibration control of micro-cantilever beam in MEMS
    Zhang, WM
    Meng, G
    PROCEEDINGS OF THE 2004 INTERNATIONAL CONFERENCE ON INTELLIGENT MECHATRONICS AND AUTOMATION, 2004, : 272 - 276
  • [45] Design and fabrication of micro-cantilever uncooled infrared detector
    Liu, HT
    Chen, YP
    Liang, PZ
    JOURNAL OF INFRARED AND MILLIMETER WAVES, 2006, 25 (01) : 46 - 49
  • [46] Operational Process for Manufacturing a MEMS Micro-Cantilever System
    Kafumbe, Said
    Danthakani, Ravichandran
    Abd-Elrady, Emad
    Alqudah, Mohammad
    Harris, Alun
    Burdess, Jim
    2015 INTERNATIONAL CONFERENCE ON INDUSTRIAL ENGINEERING AND OPERATIONS MANAGEMENT (IEOM), 2015,
  • [47] Fabrication of micro-cantilever based on micro-molding replication techniques
    Institute of Electrical Engineering, Chinese Acad. of Sci., Beijing 100190, China
    不详
    不详
    Weixi Jiagong Jishu, 2008, 5 (35-36+40):
  • [48] ABNORMAL BENDING OF MICRO-CANTILEVER PLATE INDUCECD BY A DROPLET
    Liu, Jianlin
    Zhu, Xueyan
    Li, Xinkang
    Li, Zhiwei
    ACTA MECHANICA SOLIDA SINICA, 2010, 23 (05) : 428 - 436
  • [49] ABNORMAL BENDING OF MICRO-CANTILEVER PLATE INDUCECD BY A DROPLET
    Jianlin Liu Xueyan Zhu Xinkang Li Zhiwei Li 1(Department of Engineering Mechanics
    ActaMechanicaSolidaSinica, 2010, 23 (05) : 428 - 436
  • [50] Adaptive vibration control of micro-cantilever beam in MEMS
    Zhang, Wenming
    Meng, Guang
    Li, HongGuang
    IECON 2004: 30TH ANNUAL CONFERENCE OF IEEE INDUSTRIAL ELECTRONICS SOCIETY, VOL 3, 2004, : 2430 - 2435
12345