Regulation of the refractive index of TiO2 films

被引:0
|
作者
Zhou, Ling-Ping [1 ]
Luo, Xiao-Lan [1 ]
Zhu, Jia-Jun [1 ]
Peng, Kun [1 ]
Li, De-Yi [1 ]
Li, Shao-Lu [1 ]
机构
[1] College of Materials Science and Engineering, Hunan Univ, Changsha, Hunan 410082, China
关键词
Electron beams - Evaporation - Atomic force microscopy - Film preparation - X ray diffraction - Titanium dioxide - Deposition rates - Ion beams - X ray photoelectron spectroscopy - Ion beam assisted deposition - Physical vapor deposition - Film growth;
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页码:59 / 63
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