Application of 3-D transmission electron microscopy in semiconductor device analysis

被引：0
|
作者：
Wang, Nathan [1 ]
Li, Susan [1 ]
机构：
[1] Spansion Inc.
来源：
Electronic Device Failure Analysis | 2008年 / 10卷 / 01期
关键词：
Semiconductor devices;
D O I：
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学科分类号：
摘要：
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页码：12 / 16
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