Design of On-Chip Multi-Slot Chalcogenide Waveguide for Mid-Infrared Methane Sensing

被引：0
|
作者：
Ma, Ningbo [1 ]
Qin, Zhengkun [1 ]
Pi, Mingquan [2 ]
Wang, Xueying [2 ]
Zheng, Chuantao [2 ]
Min, Yuting [2 ]
Zhao, Huan [2 ]
Song, Mingxing [1 ]
机构：
[1] Jilin Normal Univ, Coll Informat Technol, Siping, Peoples R China
[2] Jilin Univ, Coll Elect Sci & Engn, State Key Lab Integrated Optoelect, Changchun, Peoples R China
来源：
MICROWAVE AND OPTICAL TECHNOLOGY LETTERS | 2024年 / 66卷 / 11期
关键词：
chalcogenide waveguide; methane sensing; mid-infrared; multi-slot; power confinement factor; SENSOR;
D O I：
10.1002/mop.70036
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A chalcogenide (ChG) multi-slot waveguide gas sensor with ChG as the core layer and silicon dioxide (SiO2) as the under-cladding layer is proposed. Multi-slot waveguide can be used in the mid-infrared gas measurement. The optimized power confinement factor (PCF) of the ChG multi-slot waveguide can be up to 41.3%, which is similar to 20% higher than that of the optimized single-slot waveguide. At the absorption line located at 3.291 mu m for methane (CH4) measurement, the limits of detection (LoD) of single-slot, double-slot, triple-slot, quadruple-slot waveguide sensors are determined to be 68.9, 57.4, 52, 48.6 parts per million (ppm), respectively. Compared with other waveguide sensors in the mid-infrared, the PCF of the proposed multi-slot ChG/SiO2 waveguide sensor is enhanced by five times, which has the potential for highly sensitive gas sensing.
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页数：5
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