Molecular dynamics simulation of swift heavy ion irradiation effects on amorphous Nano-SiO2film

被引：0
|
作者：
Zhao, Dongdong [1 ]
Liu, Hongxia [1 ]
Wang, Qianqiong [1 ]
Wang, Shulong [1 ]
Fei, Chenxi [1 ]
机构：
[1] School of Microelectronics, Xidian University, Xi’an,Shaanxi, China
来源：
International Journal of Simulation: Systems, Science and Technology | 2015年 / 16卷 / 02期
基金：
中国国家自然科学基金;
关键词：
Electron phonon couplings - Electronic energy loss - Molecular dynamics methods - Molecular dynamics simulations - Nano- SiO - Swift heavy ion irradiation - Swift heavy ions - Thermal spike model;
D O I：
10.5013/IJSSST.a.16.02.11
中图分类号：
学科分类号：
摘要：
16
引用
收藏
页码：1 / 11
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