Effect of the core size of the core/shell structured PS/SiO2 composite abrasives on oxide-CMP behavior

被引：0
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作者：
机构：
[1] [1,Chen, Yang
[2] Li, Zhi-Na
[3] 1,Song, Zhi-Tang
[4] Min, Guo-Quan
来源：
Song, Zhi-Tang | 1600年 / Journal of Functional Materials卷 / 45期
关键词：
Emulsion polymerization - Abrasives - Chemical mechanical polishing - Synthesis (chemical) - Emulsification - Silica nanoparticles - Sol-gel process - Microspheres;
D O I：
10.3969/j.issn.1001-9731.2014.19.025
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学科分类号：
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