IonScan 800 - Ultra-precise wafer trimming technology

被引:0
|
作者
机构
来源
EuroAsia Semicond. | 2007年 / 6卷 / 17-22期
关键词
8;
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [21] RCNP techniques for producing ultra-precise beams
    Ninomiya, S
    Saito, T
    Tamura, H
    Sato, K
    CYCLOTRONS AND THEIR APPLICATIONS 2001, 2001, 600 : 94 - 98
  • [22] Study on ultra-precise machining of CLBO crystal
    Lv, X
    Yuan, JL
    Dai, Y
    Zheng, JJ
    Zhou, ZZ
    Zhao, P
    ADVANCES IN GRINDING AND ABRASIVE TECHNOLOGY XIII, 2006, 304-305 : 398 - 402
  • [23] Research on the ultra-precise measurement of cylinder diameters
    Chen, ZF
    Lu, HB
    Zhang, SZ
    Wu, MG
    ISTM/2001: 4TH INTERNATIONAL SYMPOSIUM ON TEST AND MEASUREMENT, VOLS 1 AND 2, CONFERENCE PROCEEDINGS, 2001, : 999 - 1002
  • [24] Intelligent Spindle Nose for an Ultra-Precise Tool Change
    不详
    MANUFACTURING ENGINEERING, 2015, 155 (02): : 74 - 74
  • [25] Ultra-precise Rotation Sensing with a Superluminal Ring Laser
    Yum, H. N.
    Yablon, J.
    Salit, K.
    Wang, Y.
    Shahriar, M. S.
    Salit, M.
    2010 IEEE SENSORS, 2010, : 10 - 14
  • [26] Novel scanning technique for ultra-precise measurement of topography
    Weingärtner, I
    Schulz, M
    Elster, C
    OPTICAL MANUFACTURING AND TESTING III, 1999, 3782 : 306 - 317
  • [27] Ultra-precise particle velocities in pulsed supersonic beams
    Christen, Wolfgang
    JOURNAL OF CHEMICAL PHYSICS, 2013, 139 (02):
  • [28] Study on heterodyne interferometric in fast ultra-precise positioning
    Zhong, Z
    Tan, JB
    Feng, ZD
    Zhao, WQ
    PROCEEDINGS OF THE THIRD INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION SCIENCE AND TECHNOLOGY, VOL 2, 2004, : 905 - 908
  • [29] Ion Beam Figuring System for Ultra-Precise Optics
    Yuan, Zheng
    Dai, Yi-fan
    Xie, Xu-hui
    Zhou, Lin
    PROCEEDINGS OF PRECISION ENGINEERING AND NANOTECHNOLOGY (ASPEN2011), 2012, 516 : 19 - 24
  • [30] SCIENTISTS MOVE CLOSER TO ULTRA-PRECISE 'NUCLEAR' ClOCK
    Gibney, Elizabeth
    NATURE, 2024, 629 (8012) : 514 - 515