Nanometrology system based on laser feedback effect

被引：0
|
作者：
Zeng, Zhao-Li [1 ]
Zhang, Shu-Lian [1 ]
Tan, Yi-Dong [1 ]
机构：
[1] State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments, Tsinghua University, Beijing 100084, China
来源：
Guangdianzi Jiguang/Journal of Optoelectronics Laser | 2014年 / 25卷 / 03期
关键词：
16;
D O I：
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摘要：
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页码：508 / 513
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