Linearity measurement of MEMS gyroscope vibration system based on videometrics

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作者
Zhou, Yong [1 ]
Sun, Hai-Gang [1 ]
Gao, Shi-Qiao [2 ]
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[1] School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China
[2] School of Mechatronical Engineering, Beijing Institute of Technology, Beijing 100081, China
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页码:790 / 794
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