Fabrication process comparison and dynamics evaluation of electrothermal actuators for a prototype MEMS safe and arming devices

被引：0
|
作者：
Ostrow II, S.A. [1 ]
Lake, R.A. [1 ]
Lombardi III, J.P. [1 ]
Coutu Jr., R.A. [1 ]
Starman, L.A. [1 ]
机构：
[1] Air Force Institute of Technology, 2950 Hobson Way, Wright Patterson Air Force Base, OH 45433, United States
来源：
Proceedings of the Society for Experimental Mechanics, Inc. | 2012年 / 52卷 / 07期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：1229 / 1238
相关论文
共 29 条
  • [21] Novel fabrication process for the integration of MEMS devices with thick amorphous soft magnetic field concentrators
    Brugger, Simon
    Pfleging, Wilhelm
    Paul, Oliver
    MICROELECTROMECHANICAL SYSTEMS - MATERIALS AND DEVICES, 2008, 1052 : 277 - +
  • [22] Development of the one-step DRIE dry process for unconstrained fabrication of released MEMS devices
    Docker, PT
    Kinnell, PK
    Ward, MCL
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2004, 14 (07) : 941 - 944
  • [23] A single-mask dry-release process for fabrication of high aspect ratio SOI MEMS devices
    YANG ZhenChuan
    WEI YuMin
    MAO Xu
    YAN GuiZhen
    Science China(Technological Sciences) , 2013, (02) : 387 - 391
  • [24] A single-mask dry-release process for fabrication of high aspect ratio SOI MEMS devices
    YANG ZhenChuan
    WEI YuMin
    MAO Xu
    YAN GuiZhen
    Science China(Technological Sciences), 2013, 56 (02) : 387 - 391
  • [25] A single-mask dry-release process for fabrication of high aspect ratio SOI MEMS devices
    ZhenChuan Yang
    YuMin Wei
    Xu Mao
    GuiZhen Yan
    Science China Technological Sciences, 2013, 56 : 387 - 391
  • [26] A single-mask dry-release process for fabrication of high aspect ratio SOI MEMS devices
    Yang ZhenChuan
    Wei YuMin
    Mao Xu
    Yan GuiZhen
    SCIENCE CHINA-TECHNOLOGICAL SCIENCES, 2013, 56 (02) : 387 - 391
  • [27] Fast dry fabrication process with ultra-thin atomic layer deposited mask for released MEMS-devices with high electromechanical coupling
    Koskenvuori, M.
    Chekurov, N.
    Airaksinen, V-M.
    Tittonen, I.
    TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2007,
  • [28] A Novel Micro-Fabrication Process for Integration of Superconductor Niobium-Based RF Circuits with Gold-Based RF MEMS Devices
    Attar, Sara S.
    Laforge, Paul
    Mansour, Raafat R.
    2014 44TH EUROPEAN MICROWAVE CONFERENCE (EUMC), 2014, : 203 - 206
  • [29] Evaluation of the feasibility of the powder injection moulding process for the fabrication of nuclear fuel and comparison of several formulations
    Bricout, J.
    Matheron, P.
    Ablitzer, C.
    Gelin, J. C.
    Brothier, M.
    Barriere, Th
    POWDER TECHNOLOGY, 2015, 279 : 49 - 60
123