Fabrication process comparison and dynamics evaluation of electrothermal actuators for a prototype MEMS safe and arming devices

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作者：
Ostrow II, S.A. [1 ]
Lake, R.A. [1 ]
Lombardi III, J.P. [1 ]
Coutu Jr., R.A. [1 ]
Starman, L.A. [1 ]
机构：
[1] Air Force Institute of Technology, 2950 Hobson Way, Wright Patterson Air Force Base, OH 45433, United States
来源：
Proceedings of the Society for Experimental Mechanics, Inc. | 2012年 / 52卷 / 07期
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页码：1229 / 1238
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