共 50 条
- [31] Characterization of carbon thin films prepared by high power impulse magnetron sputtering 1600, Vacuum Society of Japan (60): : 341 - 345
- [34] Influence of rf power on carbon nitride films prepared by rf magnetron sputtering FOURTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS, 2000, 4086 : 540 - 543
- [38] Indium doping of amorphous SiC:H films prepared by reactive magnetron co-sputtering Thin Solid Films, 1 (189-193):
- [39] Corrosion and wear resistance of SiC:Cu:a-C composite films prepared by magnetron sputtering SURFACE & COATINGS TECHNOLOGY, 2023, 464