Analysis of thin-film PZT/LNO stacks on an encapsulated TiN electrode

被引：0
|
作者：
Kaleli, B. [1 ]
Nguyen, M.D. [1 ,2 ,3 ]
Schmitz, J. [1 ]
Wolters, R.A.M. [1 ,4 ]
Hueting, R.J.E. [1 ]
机构：
[1] MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, AE Enschede,7500, Netherlands
[2] SolMateS BV, Drienerlolaan 5 (Bldg. 46), NB Enschede,7522, Netherlands
[3] International Training Institute for Materials Science (ITIMS), Hanoi University of Science and Technology, No. 1 Dai Co Viet Road, Hanoi, Viet Nam
[4] NXP Semiconductors Eindhoven, High Tech Campus 46, AE Eindhoven,5656, Netherlands
来源：
Microelectronic Engineering | 2014年 / 119卷
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页码：16 / 19
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