Measuring 3-D semiconductor packaging

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Department of Industrial Microscopy and Metrology, Nikon Instruments Inc., Melville, NY, United States [1 ]
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Aberrations - Charge coupled devices - Electronics packaging - Light interference - Light reflection;
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As a biosience research technique, confocal microscopy offers several advantages over conventional optical microscopy, including controllable depth of field, elimination of image degradation from out-of-focus information and the ability to collect serial Z-axis optical sections. The confocal approach uses spatial filtering to eliminate out-of-focus flare in samples thicker than the focus plane. Confocal microscopy's various imaging modes rely on techniques needed to produce high-resolution images in sequence. Nikon Instruments offers a confocal measuring head for industrial applications that require fast and accurate height measurement.
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