Thermal annealing effects on the optical and electrical properties of a-SiC:H thin films sputtered at different hydrogen flow rates

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Department of Electrical Engineering, Technological Educational Institute of Kavala, St. Loukas 65404 Kavala, Greece [1 ]
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J. Optoelectron. Adv. Mat. | 2007年 / 7卷 / 2030-2035期
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