Fabrication and evaluation of single-crystal-silicon tunable grating using polymer-based membrane transfer bonding process

被引：0

作者：

Hane-Sasaki, Kanamori Laboratory, Tohoku University, 6-6-01, Aramaki, Aoba-ku, Sendai ^{[1
]}

Miyagi

980-8579, Japan

不详 ^{[2
]}

Miyagi

985-8537, Japan

机构：

来源：

IEEJ Trans. Sens. Micromach. | / 9卷 / 361-366期

基金：

日本学术振兴会;

关键词：

Silicon wafers - Glass bonding - MEMS - Wafer bonding - Diffraction gratings - Single crystals;

D O I：

10.1541/ieejsmas.135.361

中图分类号：

学科分类号：

摘要：

We developed a fabrication process of MEMS tunable grating supported by patterned polymer. The tunable grating was fabricated on single crystal silicon with thickness of 260 nm using membrane transfer bonding technique on glass. To obtain a good defined anchor structure of grating, two kinds of polymers were used for the fabrication of bonded wafer. The characteristic of the tunable grating ribbon was measured. The tunable grating ribbon was successfully actuated with the time to peak of 26 μs. Changing of diffraction pattern of the device was also demonstrated. © 2015 The Institute of Electrical Engineers of Japan.

引用