Preparation and performance study of polyfluorin thin film by radio frequency magnetron sputtering method

被引：0
|
作者：
Gao, Yuan [1 ,2 ]
Qin, Xiao-Gang [2 ]
Guo, Yun [2 ]
Liu, Hui-Tao [1 ]
机构：
[1] Science and Engineering College of Chemistry and Biology, Yantai University, Yantai 264005, China
[2] National Key Lab. of Vacuum and Cryogenics Technology and Physics, Lanzhou Institute of Physics, China Academy of Space Technology, Lanzhou 730000, China
来源：
Hangkong Cailiao Xuebao/Journal of Aeronautical Materials | 2009年 / 29卷 / 05期
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摘要：
8
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页码：60 / 65
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